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804FS 데이터시트(PDF) 2 Page - Agilent(Hewlett-Packard)

부품명 804FS
상세설명  Agilent TwisTorr 804 FS
PDF  4 Pages
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제조업체  HP [Agilent(Hewlett-Packard)]
홈페이지  http://www.home.agilent.com
Logo HP - Agilent(Hewlett-Packard)

804FS 데이터시트(HTML) 2 Page - Agilent(Hewlett-Packard)

  804FS Datasheet HTML 1Page - Agilent(Hewlett-Packard) 804FS Datasheet HTML 2Page - Agilent(Hewlett-Packard) 804FS Datasheet HTML 3Page - Agilent(Hewlett-Packard) 804FS Datasheet HTML 4Page - Agilent(Hewlett-Packard)  
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Technical Specification
Pumping speed
ISO200K-F
ISO250K-F
CFF10
N
2
He
H
2
Ar
720 L/s
660 L/s
485 L/s
690 L/s
Max Gas Throughput(*)
Air Cooling
(25°C Air temperature)
Water Cooling
(15°C Water temperature / 25°C
room temperature)
N
2
4.3 mbarL/s
255 SCCM
6.1 mbar L/s
367 SCCM
He
7.9 mbar L/s
467 SCCM
10.4 mbar L/s
615 SCCM
Ar
1.5 mbar L/s
89 SCCM
3.3 mbar L/s
195 SCCM
(*) Backing pump 11.6 m3/hr
Compression ratio and foreline tolerance*
N
2
He
H
2
Ar
>1E+11
2E+08
3E+06
>1E+11
10 mbar
10 mbar
>4 mbar
8.5 mbar
(*) Foreline Tolerance defined as the pressure at which the turbopump still produce a
compression of 100 and estimated in water cooling mode
Base pressure with re-
comm. forepump
< 1 x 10-10 mbar
(< 1 x 10-10 Torr)
Inlet flange
ISO 200K, ISO 200F, ISO 250K,
ISO 250F, CFF 10”
Foreline flange
NW25 or NW40
Rotational speed
Auto setting from 40'800 RPM to 49'500 RPM
Start-up time
< 5 minutes
Technical Specification
Recommended forepump
DS302
IDP10
IDP15
Operating position
Any
Oper. ambient temperature
+5 °C to +35 °C
Rel. humidity of air
0 to 90% (not condensing)
Bakeout temperature
ISO pump: 80°C at inlet flange
CFF pump: 120°C at inlet flange
Lubricant
Permanent grease lubrication
Cooling requirements
Air cooling
Air temperature from +5°C to 35°C
Water cooling
Water temperature from +15°C to +25°C
Water flow min. 100L/h
Noise Pressure Level
(at 1m at full speed)
43dB(A)
Storage temperature
-40 °C to +70 °C
Max altitude
3000 m
Weight kg (lbs)
ISO200K
ISO200F
ISO250K
ISO250F
CFF 10"
20.7 Kg / 45.5 lbs.
23.6 Kg / 51.9 lbs.
23.3 Kg / 51.2 lbs.
27.6 Kg / 60.9 lbs.
22.1 Kg / 48.6 lbs.
Conformity to norms
EMC (Control Units)
Safety (CE/CSA)
Machinery Directive
Low Voltage Directive
EMC Directive (Control Units)
ROHS
61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU
Outline Drawing
Technical Specification
Ø207.5 [8.17]
Ø253.24 [9.97]
Ø207.5 [8.17]
Ø240 [9.45]
115.25 [4.54]
117.25 [4.62]
12°
115.25 [4.54]
117.25 [4.62]
12°
Ø207.5 [8.17]
Ø334.9 [13.19]
115.25 [4.54]
117.25 [4.62]
12°
CFF 10"
ISO 200K
ELECTRICAL
CONNECTOR
VENT
SCREW
FORELINE
FLANGE KF25
ELECTRICAL
CONNECTOR
VENT
SCREW
FORELINE
FLANGE KF25
ISO 250F
ELECTRICAL
CONNECTOR
VENT
SCREW
FORELINE
FLANGE KF40
PURGE
SCREW
PURGE
SCREW
PURGE
SCREW
3D Drawings available for download



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