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52B 데이터시트(PDF) 3 Page - MKS Instruments.

부품명 52B
상세설명  Provides high reliability which reduces downtime and lowers the cost of ownership
PDF  4 Pages
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제조업체  MKS [MKS Instruments.]
홈페이지  https://www.mksinst.com/
Logo MKS - MKS Instruments.

52B 데이터시트(HTML) 3 Page - MKS Instruments.

  52B Datasheet HTML 1Page - MKS Instruments. 52B Datasheet HTML 2Page - MKS Instruments. 52B Datasheet HTML 3Page - MKS Instruments. 52B Datasheet HTML 4Page - MKS Instruments.  
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Specifications
Full Scale Ranges
10 Torr through 500 psi (Consult Applications Engineering on Full Scale ranges
in other engineering units. Selection of trip point and Full Scale range should be
as close as possible as trip point accuracy is affected by the Full Scale range)
Trip Point Range
5% to 100% of F.S.
Accuracy
±0.5% of F.S. (±temperature coefficient)
Temperature Coefficient*
±0.07% of F.S./°C
Ambient Operating Temperature
0° to 50°C
Trip Point Dead Band
±3% of F.S.(nominal)
Response Time
<20 msec
Materials Exposed to Process Gases
Inconel and 316L S.S.
10 µRa max. on switches with Swagelok® VCR® fittings (5 µRa max. optional)
Internal Volume
3.3 cc for single-ended, 6.6 cc for flow-through
Overpressure
2 × F.S. or 45 psia, whichever is greater
Outputs
Electromechanical relay
SPDT (isolated) contacts rated up to 1 Amp @ 30 VDC resistive. Relay is
energized either with increasing pressure or decreasing pressure.
Input Power Required
10 to 20 VDC @ 35 mA max. or 20 to 30 VDC @ 30 mA max.
Fittings
42B/52B
4 VCR® male
41B/51B
4 VCR® male and female, NW 16 KF, 1/8'' male NPT, 1/4'' male NPT
Compliance
CE
*Example: A 100 Torr sensor with a 2°C change has a trip point temperature-induced error less than or equal to:
(0.0007 x 100 Torr x 2) = 0.14 Torr error anywhere within the trip point range
Note: Atmospheric switches provide a means by which the trip set point is referenced to current atmospheric conditions. “Reverse
Calibration” allows the trip point to be set at or below the current atmospheric pressure. When ordering, a value of 000 in the last three
digits of the model code would equate to atmospheric pressure. A value of 002 would equate to 2 Torr or 2 PSIG below atmospheric
pressure, depending on the use of the “D” or “C” ordering code for Full Scale range.
This method provides an excellent mechanism to achieve switching at current atmospheric conditions, regardless of the location of the
installed base or present weather conditions.



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