628F datasheet(13/16 Pages) MKS

13 / 16 page

Ordering Information

622C, 623F, 626C, 627F, 628F, E27F, and E28F

627F

11T

Configuration

Ordering Code Example: 627F11TBC1B

Code

Example

Absolute Capacitance Manometers

Unheated; terminal block connector; standard sensor

622C

Unheated; relays; terminal block; standard sensor

623F

Unheated; 15-pin D-connector; standard sensor

626C

45°C sensor temp; 15-pin D-connector; standard sensor

627F

100°C sensor temp; 15-pin D-connector; standard sensor

628F

45°C sensor temp; 15-pin D-connector; etch sensor

E27F

100°C sensor temp; 15-pin D-connector; etch sensor

E28F

Pressure Ranges Full Scale (Torr)

0.02 (available on 627F and E27F)

U2T

0.05 (available on 627F, E27F, 628F, E28F)

U5T

0.10 (not available on 622C, 623F)

.1T

0.25 (not available on 622C, 623F)

RET

1 (not available on 623F)

01T

2 (not available on 623F)

02T

11T

21T

100

12T

200 (available on 623F, 627F, 628F)

22T

500 (not available on E27F, E28F)

52T

1000 (not available on E27F, E28F)

13T

2000 (available on 627F, 628F)

23T

5000 (available on 627F, 628F)

53T

10,000 (available on 627F, 628F)

14T

15,000 (available on 627F, 628F)

RBT

20,000 (available on 627F, 628F)

24T

25,000 (available on 627F, 628F)

RCT

Fittings

1/2” OD (12.7 mm) tubulation

Swagelok 8 VCR, female

1.33” OD Conflat, rotatable1

NW16-KF2

NW25-KF2

Swagelok 8 VCO, female

2.75” OD Conflat, rotatable1

Accuracy (% of Reading)

0.12% (627F and E27F 1 Torr range and higher)

0.15% (627F and E27F in 0.25, 0.10, 0.05 Torr ranges)

0.25% (622C, 623F, 626C, 628F, E28F, and 0.02 Torr 627F and E27F)

0.50% (628F and E28F in 0.25, 0.10, 0.05 Torr ranges)

Options (not available on 622C, 623F, 626C)

Standard configuration, vertical calibration

(627F, E27F, 628F, E28F only; 1 Torr and higher)

Temperature/Heater status, vertical calibration

(627F, E27F, 628F, E28F only; 1 Torr and higher)

Standard configuration, horizontal calibration (E27F, E28F only; < 1 Torr)

Temperature/Heater status, horizontal calibration (E27F, E28F only; < 1 Torr)

Connector (not available on 622C, 623F, 626C)

15-pin D-connector, thread locks (627F, E27F, 628F, E28F only)

15-pin D-connector, slide locks (627F, E27F, 628F, E28F only)

1Available only on ranges of 1000 Torr and less.

2Available only on ranges of 5000 Torr and less, and 2000 and 5000 Torr ranges require use of an MKS overpressure ring.

3Other relay settings and logic available; contact MKS Applications for assistance.

628F 데이터시트(PDF) 13 Page - MKS Instruments.

628F 데이터시트(HTML) 13 Page - MKS Instruments.

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