DA02A datasheet(4/4 Pages) MKS

4 / 4 page

Ordering Information

DA02A - 12/18

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local

government export licenses under ECCN 2B230.

Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of

MKS Instruments, Inc., Andover, MA. Inconel® and Incoloy® are registered trademarks of Inco Alloys, Inc., Huntington, WV.

EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. VCR® and

VCO® are registered trademarks of Swagelok Corporation, Solon, OH. SEMI® is a registered trademark of SEMI, San Jose,

CA.

DA02A

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

Tel: 800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

Six Shattuck Road

Andover, MA 01810

Tel: 978.975.2350

Ordering Example: DA02A11TCES24C00AA

Code

Configuration

DA02A Baratron Digital Capacitance Manometer

DA02A

Range

0.1

0.25

100

200

500

1000

Units of Measurement

Torr absolute

mbar absolute

kPa absolute

Fittings

1/2'' OD tube

8 female VCR

8 male VCR

8 female VCR, short tube

KF16

KF25

8 VCO® female

1.33'' OD CF

Sensor Type

Standard sensor, standard inlet tube length

Etch sensor (range

≤ 100 Torr only), standard inlet tube length

Standard sensor, reduced inlet tube length

Etch sensor (range

≤ 100 Torr only), reduced inlet tube length

Input/Output Voltages

+24 VDC or ±15 VDC input, 0-10 VDC analog output

Sensor Temperatures

Unheated

45°C

80°C

100°C

Electrical Connector

(2) RJ45 EtherCAT jacks with 15-pin D-subminiature connector

Calibration Orientation

Standard (ranges

≥ 1 Torr)

Vertical (ranges < 1 Torr only)

Horizontal (ranges < 1 Torr only)

Accuracy

Standard accuracy

Trip Points

None

Trip A above 50%, Trip B above 50% of Full Scale Range

Trip A above 50%, Trip B below 50% of Full Scale Range

Trip A below 50%, Trip B below 50% of Full Scale Range

Trip A below 50%, Trip B above 50% of Full Scale Range

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