970B datasheet(3/4 Pages) MKS

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Specifications

Series 971B

Series 972B

Series 974B

Sensor Type

Cold Cathode

Cold Cathode / MicroPirani

(MEMS Thermal Conductivity)

Cold Cathode / MicroPirani

(MEMS Thermal Conductivity) / Piezo

Differential (MEMS Diaphragm)

Measuring Range Absolute

1 x 10-8 Torr to 5 x 10-3 Torr

1 x 10-8 Torr to Atmosphere

1 x 10-8 Torr to 1500 Torr

Measuring Range Differential

not available

-760 to +760 Torr

Set Point Range Absolute

1 x 10-8 Torr to 5 x 10-3 Torr

1 x 10-8 Torr to Atmosphere

1 x 10-8 Torr to 1000 Torr

Set Point Range Differential

not available

-760 to +100 Torr

Calibration Gas

Nitrogen

Operating Temperature Range

0° to 40°C (32° to 104°F)

Maximum Bakeout Temperature

80°C (176°F), non-operating

Digital Communications

RS485 or RS232

RS485, RS232 or EtherCAT

RS485 or RS232

Electrical Connectors

RS232/RS485/Analog

EtherCAT (972B only)

15-pin D-subminiature male

Two (2) RJ45 female

15-pin D-subminiature male

Controls

Pressure units, baud rate, address, factory

default, user tag, RS485 test, gas correction; set

point functions: value, hysteresis, direction, HV

enable, protect, control set point, gas type

Pressure units, baud rate, address, factory

default, user tag, RS485 test, gas correction; set

point functions: value, hysteresis, direction, HV

enable, protect, control set point, gas type

Pressure units, baud rate, address, factory

default, user tag, RS485 test, gas correction; set

point functions: value, hysteresis, direction, HV

enable, protect, control set point, gas type

Status

Pressure reading and units, set point,

transducer temperature, user tag, model, device

type, serial number, firmware and hardware

versions

Pressure reading and units, set point,

transducer temperature, user tag, model, device

type, serial number, firmware and hardware

versions

Pressure reading and units, set point,

transducer temperature, user tag, model, device

type, serial number, firmware and hardware

versions

Analog Output

(Absolute Pressure)

0.5 VDC / decade

Relays, Optional RS232/RS485

3 relays, SPST

Relay Contact Rating

1 A @ 30VAC/DC, resistive

Power Requirements

9-30 VDC, 2 W

Accuracy (Typical)

Combined Absolute

5 x 10-8 Torr to 10-3 ± 30% of reading

10-3 to 100 ±5% of reading

5 x 10-8 Torr to 10-3 ± 30% of reading

10-3 to 50 Torr ±5% of reading

50 to 1000 Torr ± 1% of reading

Repeatability (Typical)

Combined Absolute

5 x 10-8 Torr to 10-3 ± 30% of reading

10-3 to 100 ±2% of reading

5 x 10-8 Torr to 10-3 ± 30% of reading

10-3 to 50 ±2% of reading

50 to 1000 Torr ± 1% of reading

Accuracy (Typical) 1

Differential

not available

-10 to +10 Torr ±10% of reading

-100 to -10 Torr ±8% of reading

-760 to -100 Torr ±1% of reading

+10 to 100 Torr ±5% of reading

Repeatability (Typical) 1

Differential

not available

-760 to +10 Torr ±1% of reading

Zero Stability (Typical) 1

Differential

not available

±0.1% of Full Scale (F.S. = 760 Torr)

Overpressure Limit

1500 Torr

Installation Orientation

Any

Internal Volume

21 cm3

Materials Exposed to Vacuum

304 and 403 stainless steel, Viton®,

Cu-Ni and Ag-Cu alloy, ceramic, titanium

304 and 403 stainless steel, silicon, SiO

2, SiN4,

gold, Viton®, epoxy resin, ceramic, titanium

304 and 403 stainless steel, silicon, SiO

2, SiN4,

gold, Viton®, epoxy resin, ceramic, titanium

Electronic Casing

304 stainless steel

Weight (with NW25 KF Flange)

12.7 oz (360 g)

Compliance

CE, ETG.5003.2080 Vacuum Pressure Gauge

Note: Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment.

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