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전자부품 데이터시트 검색엔진 |
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전자부품 데이터시트 검색엔진 |
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MICROVISION2 데이터시트(PDF) 7 Page - MKS Instruments. |
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MICROVISION2 데이터시트(HTML) 7 Page - MKS Instruments. |
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7 / 8 page  Specifications Microvision 2 Analyzers double (standard configuration) 5” Single triple ranges, amu 100, 200, 300 100, 200 1-6, 100, 200, 300 Max. operating pressure 7.6e-5 Torr (1e-4 mbar) 7.6e-5 Torr (1e-4 mbar) 7.6e-5 Torr (1e-4 mbar) ion source sensitivity 2e-4 A/mbar 2e-4 A/mbar 2e-4 A/mbar Min. detectable partial pressure, open ion source 3 standard deviations of baseline noise at 300ms integration 3 standard deviations of base- line noise at 300ms integration 3 standard deviations of base- line noise at 300ms integration Faraday 1.5e-11 Torr (2e-11 mbar) 1.5e-11 Torr (2e-11 mbar) 1.5e-11 Torr (2e-11 mbar) Microchannel plate 3.8e-14 Torr (5e-14 mbar) 3.8e-14 Torr (5e-14 mbar) 3.8e-14 Torr (5e-14 mbar) Single channel eM n/a n/a 7.6e-15 Torr (1e-14 mbar) bakeout temperature 250°C (with extender or electronics removed) 250°C (with extender or electronics removed) 250°C (with extender or electronics removed) operating temperature •200°C(Faradayonlywith electronics at 10-40°C) •150°C(multiplierdetectionwith electronics 10-40°C and pressure <1e-8 mbar) •90°C(multiplierdetectionwith electronics 10-40°C and pressure <1e-5 mbar) •200°C(Faradayonlywith electronics at 10-40°C) •150°C(multiplierdetection with electronics 10-40°C and pressure <1e-8 mbar) •90°C(multiplierdetectionwith electronics 10-40°C and pressure <1e-5 mbar) •200°C(Faradayonlywith electronics at 10-40°C) •150°C(multiplierdetection with electronics 10-40°C and pressure <1e-8 mbar) •90°C(multiplierdetectionwith electronics 10-40°C and pressure <1e-5 mbar) Filament materials Tungsten or Thoria coated Iridium Tungsten or Thoria coated Iridium Tungsten or Thoria coated Iridium uhV ion source Option Standard Option uhV out-gassing rate <1e-9 mbar -l/s <1e-9 mbar -l/s <1e-9 mbar -l/s pVd ion source Option n/a Option cross beam ion source Option n/a Option resolution Better than 10% valley for peaks of equal height across mass range Better than 10% valley for peaks of equal height across mass range Better than 10% valley for peaks of equal height across mass range peak position drift ±0.1 amu over 8 hours at stable flange temperature ±0.1 amu over 8 hours at stable flange temperature ±0.1 amu over 8 hours at stable flange temperature Zero blast effect at mass 2 (closed ion source) <5 ppm baseline levels next to mass 2 n/a <5 ppm baseline levels next to mass 2 Flange fitting DN 40 CF-F DN 40 CF-F DN 40 CF-F compliance CE |
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