2

IndyStar

Specifications

193 1 kHz

193 2 kHz

248 1 kHz

248 2 kHz

Wavelength (nm)

193

193

248

248

Nominal Pulse Energy (mJ)

8

4

12

6

Nominal Pulse Power (W)

8

8

12

12

Maximum Pulse Energy (mJ)

12

8

16

8

Energy Stability (sigma, %)

<2

<2

<2

<2

Maximum Repetition Rate (Hz)

1000

2000

1000

2000

Beam Dimension (FWHM, mm, V x H)

(5.7 ±0.5) x (2.5 ±0.5)

(5.5 ±0.5) x (2.3 ±0.5)

(5.7 ±0.5) x (2.7 ±0.5)

(5.9 ±0.5) x (2.7 ±0.5)

Beam Divergence (FWHM, mrad, V x H) (2.25 ±0.5) x (1.0 ±0.5) (2.75 ±0.5) x (1.0 ±0.5)

(2.4 ±0.5) x (1.6 ±0.5)

(3.4 ±0.7) x (1.7 ±0.5)

Pulse Duration (FWHM, ns)

5 ±2

4 ±1

6 ±2

4 ±1

Cooling

Air/Water

Water

Air/Water

Water

Weight

135 kg (297 lbs.)

Laser Dimensions

996.5 x 381 x 828 mm (39.2 x 15 x 32.6 in.)

Electrical

230 V (1-phase) / 208 V (2-phase), 50/60 Hz, 2100 VA

IndyStar Series Energy Performance

Typical Performance Data

High Voltage (%)

0

5

10

15

20

25

0102030405060708090100

IndyStar 193 nm/2 kHz

IndyStar 248 nm/1 kHz

IndyStar 193 nm/1 kHz

IndyStar 248 nm/2 kHz