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PRO115LM SPECIFICATIONS

Electrical Specifications

Drive System

Brushless Linear Servomotor

Feedback

Non-contact Linear Encoder

-E1: 1 Vpp, 20 µm signal period

-E2: Digital RS422, 0.1 µm electrical resolution

Maximum Bus Voltage

340 VDC

Limit Switches

5 V, Normally-Closed

Home Switch

Near Center

Notes:

1. Certified with -PL1/-PL2 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis-orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

Mechanical Specifications

PRO115LM

Travel

50

100

150

200

300

400

Accuracy(1)

Standard

±3 µm

±4 µm

±6 µm

±8 µm

±10 µm

±12 µm

Calibrated

±0.75 µm

±1 µm

±1 µm

±1.5 µm

±1.5 µm

±1.5 µm

Resolution

(Min. Incremental Motion)

5 nm (-E1 Encoder)

Bidirectional Repeatability(1)

±0.4 µm

±0.4 µm

±0.4 µm

±0.5 µm

±0.5 µm

±0.5 µm

Horizontal Straightness(1)

±1.5 µm

±2.5 µm

±3 µm

±4 µm

±6 µm

±8 µm

Vertical Straightness(1)

±1.5 µm

±2.5 µm

±3 µm

±4 µm

±6 µm

±8 µm

Pitch

19 µrad

29 µrad

29 µrad

39 µrad

58 µrad

78 µrad

Roll

19 µrad

29 µrad

29 µrad

39 µrad

58 µrad

78 µrad

Yaw

19 µrad

29 µrad

29 µrad

39 µrad

58 µrad

78 µrad

Maximum Speed(2)

2 m/s

Maximum Acceleration(2)

3 g

Maximum Force, Continuous

20.8 N

Load Capacity(3)

Horizontal

40 kg

Side

40 kg

Moving Mass

1.9 kg

Stage Mass

5.1 kg

5.7 kg

6.2 kg

6.8 kg

7.9 kg

9.0 kg

Material

Anodized Aluminum

MTBF (Mean Time Between Failure)

20,000 Hours