OUTLINE

The P-810 is ideal for measuring the flow rates of various gases in

semiconductor production. High reliability is ensured by circumferential seals.

The P-810 has a solid track record in applications with various devices.

Electrolytically polished models with low leakage are also available.

MAJOR APPLICATIONS

Gas flow measurement in semiconductor production equipment,

especially for low-leakage lines

STANDARD SPECIFICATIONS

Measuring fluid

Gases

Liquid (Equivalent to water：Density 1.0ｇ/ｃｍ3,

Viscosity 1.0mPa・s)

Measuring range

Air Min. 5 to 50 mL/min（nor）

Max. 6 to 60 L/min（nor）

Water Min. 5 to 50 mL/min

Max. 0.2 to 2 L/min

・When selecting a flow range, refer to "Index &

Quick Reference for P Series Purgemeters"

(TG-S0001).

Range ability

10：1

Indication accuracy

± 3％ F.S.

Fluid pressure

Max. 0.8 MPa

Fluid temperature

Max. 120ºC（Depends on the gasket material）

Material

Wetted part

SCS14（Standard）, SUS316（Electrolytically polished）

Tapered tube Heat-resistant glass

Gasket

Fluoro rubber (Max. 120ºC)

Chloroprene rubber (Max. 80ºC)

・The maximum fluid temperature for each

gasket material may vary depending on usage

and ambient conditions.

Mounting plate SUS304

Cover

Transparent PVC

Process Connection

Rc : 1/4"（Standard）,1/8"

NPT : 1/4", 1/8"

SW : 1/4", 3/8"

VCR : 1/4", 3/8"

Mounting

Lock nut mount on the panel front (Standard)

Bezel mounting

Mass

approx. 0.6ｋｇ

ALARM CONTACT AND OUTPUT

Type

Availability

Reed switch type alarm unit

General

×

UL-approved

×

PAU optical alarm unit

○

For CE approval, refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).

STANDARD FLOW RATE TABLE

When the fluid pressure is other than 0 MPa, refer to "Index & Quick Reference for P Series

Purgemeters" (TG-S0001).

For alarm output codes of 0 or E

Air (0ºC, 0 MPa)

Water

5 to 50 mL/min（nor）

10 to 100 mL/min（nor）

20 to 200 mL/min（nor）

30 to 300 mL/min（nor）

50 to 500 mL/min（nor）

0.1 to 1

  L/min（nor）

0.2 to 2

  L/min（nor）

5 to 50 mL/min

0.3 to 3

  L/min（nor）

10 to 100 mL/min

0.5 to 5

  L/min（nor）

20 to 200 mL/min

1 to 10   L/min（nor）

30 to 300 mL/min

2 to 20   L/min（nor）

50 to 500 mL/min

3 to 30   L/min（nor）

0.1 to 1

  L/min

5 to 50   L/min（nor）

0.15 to 1.5   L/min

6 to 60   L/min（nor）

0.2 to 2

  L/min

Although other flow rate specifications are available, some flow ranges need to be

changed. Contact us for details.

BASIC MODEL CODE

Model Code

Descriptions

Notes

P-81

3 — □ □ — □ □ — □ □

Face-

to-face

dimension

3

Standard (224mm)

Valve

— 0

Not provided

Refer to "Index & Quick

Reference for P Series

Purgemeters" (TG-S0001).

— 1

Bellows valve at the

outlet

— 2

Bellows valve at the

inlet

— 3

Needle valve at the

outlet

— 4

Needle valve at the

inlet

— Z

Special

Alarm output

0

Not provided

Refer to "Index & Quick

Reference for P Series

Purgemeters" (TG-S0001).

E

PAU alarm unit

provided

Z

Special

Wetted parts material

— 6

SCS14 (Standard)

— E

SUS316

（Electrolytically

polished）

Selectable when the

connection type code is V＊

— Z

Special

Gasket material

F

Fluoro rubber

(Standard)

C

Chloroprene rubber

(CR)

Select this code for

ammonia gas.

Z

Special

Process connection type

— R

Rc (Standard)

Bezel mounting is available.

For details, refer to "Index

& Quick Reference for P

Series Purgemeters" (TG-

S0001).

— N

NPT female

— S

SW

— V

VCR (Male connector)

— Z

Special

Process connection size

1 1/8"

Selectable when the

connection type code is R

or N

2 1/4" (Standard)

3 3/8"

Selectable when the

connection type code is S

or V

Z Special

＊

When connection type code V is not selected, the fitting parts cannot

be electrolytically polished.

OTHER AVAILABLE OPTIONS

You can specify the following options:

Double graduations, special graduations, with/without a stand, built-in

rubber fitting type, various fitting types, etc.

For details, refer to "Index & Quick Reference for P Series Purgemeters"

(TG-S0001).

Circumferentially sealed, low-leakage purgemeter for

measuring gases and liquids

P-810

Purgemeter

TG-F2412-E01

Jun 2024

Sep 2023

2nd edition

1st edition

K

K