DA6512.000

11 July, 2012

4 (26)

ELECTRICAL CHARACTERISTICS

Parameter

Symbol

Conditions

Min

Typ

Max

Unit

Internal offset capacitor

matrix selection

0

0.086

22

pF

Changing capacitance

range in capacitance

difference mode

∆

No internal clock division

Internal clock / 2

2

2

20

30

pF

Maximum allowed sensor

capacitance in capacitance

difference mode

Internal clock

Internal clock / 2

External clock

20

40

Note 1.

pF

Changing capacitance

range in capacitance ratio

mode

∆

Note 2.

2

20

pF

Maximum allowed sensor

capacitance in capacitance

ratio mode

Note 2.

20

>20

pF

Integral nonlinearity

INL

OSR=256, capacitance

difference mode

0.012

% of

∆

C

RMS resolution

Difference mode

∆

C=20pF

OSR=4096

14

bit

RMS resolution

Ratio mode

∆

C=20pF

OSR=4096

14

bit

Internal temperature

sensor

Linearity

±0.35

±0.5

°C

Gain

OSR=4096

OSR=2048

OSR=1024

OSR=512

OSR=256

267,8

267,6

267,3

33,3

4,1

LSB/

°C

Non-calibrated, note 3.

-4.5

+3.5

%

Offset

Non-calibrated, note 3.

±11

°C

Note 1. In capacitance difference mode the maximum allowed sensor and reference capacitor values can be extended using lower external

Note 2. In capacitance ratio mode also larger capacitances are possible depending on sensor characteristics. Please contact Micro Analog

Systems to check sensor suitability.

Note 3. By calibrating the temperature measurement and compensating offset and gain errors an overall accuracy close to the linearity

accuracy can be achieved.