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LPS25H 데이터시트(PDF) 11 Page - STMicroelectronics |
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LPS25H 데이터시트(HTML) 11 Page - STMicroelectronics |
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11 / 45 page ![]() DocID023722 Rev 5 11/45 LPS25H Functionality 45 3 Functionality The LPS25H is a high resolution, digital output pressure sensor packaged in a HCLGA holed package. The complete device includes a sensing element based on a piezoresistive Wheatstone bridge approach, and an IC interface able to take the information from the sensing element to the external world, as a digital signal. 3.1 Sensing element An ST proprietary process is used to obtain a mono-silicon µ-sized membrane for MEMS pressure sensors, without requiring substrate to substrate bonding. When pressure is applied, the membrane deflection induces an imbalance in the Wheatstone bridge piezoresistances, whose output signal is converted by the IC interface. Intrinsic mechanical stoppers prevent breakage in case of pressure overstress, ensuring measurement repeatability. The pressure inside the buried cavity under the membrane is constant and controlled by process parameters. 3.2 IC interface The complete measurement chain is composed by a low-noise amplifier which converts the resistance unbalancing of the MEMS sensors (pressure and temperature) into an analog voltage that is finally available to the user by an analog-to-digital converter. The pressure and temperature data may be accessed through an I²C/SPI interface thus making the device particularly suitable for direct interfacing with a microcontroller. The LPS25H features a Data-Ready signal which indicates when a new set of measured pressure and temperature data are available thus simplifying data synchronization in the digital system that uses the device. 3.3 Factory calibration The IC interface is factory calibrated at three temperatures and two pressures for sensitivity and accuracy. The trimming values are stored inside the device by a non-volatile structure. Whenever the device is turned on, the trimming parameters are downloaded into the registers to be employed during normal operation. This allows the user to employ the device without requiring any further calibration. 3.4 FIFO The LPS25H embeds FIFO register able to store 32 pressure output values, in order to improve the system power saving, since the host processor does not need to continuously poll data from the sensor, but it can wakeup only when requested and burst the significant data out from the FIFO. |
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