MPXV6115VC6U

Rev 1, 05/2005

Freescale Semiconductor

Technical Data

© Freescale Semiconductor, Inc., 2005. All rights reserved.

High Temperature Accuracy

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The MPXV6115VC6U sensor integrates on-chip, bipolar op amp circuitry and

thin film resistor networks to provide a high output signal and temperature

compensation. The small form factor and high reliability of on-chip integration

make the Freescale Semiconductor, Inc. pressure sensor a logical and

economical choice for the system designer.

The MPXV6115VC6U piezoresistive transducer is a state-of-the-art,

monolithic, signal conditioned, silicon pressure sensor. This sensor combines

advanced micromachining techniques, thin film metallization, and bipolar

semiconductor processing to provide an accurate, high level analog output signal

that is proportional to applied pressure.

Figure 1 shows a block diagram of the internal circuitry integrated on a

pressure sensor chip.

Features

•

Improved Accuracy at High Temperature

•

1.5% Maximum Error over 0

° to 85°C

•

Ideally suited for Microprocessor or Microcontroller-Based Systems

•

Temperature Compensated from -40

° to +125°C

•

Durable Thermoplastic (PPS) Surface Mount Package

Typical Applications

•

Vacuum Pump Monitoring

•

Brake Booster Monitoring

Figure 1. Fully Integrated Pressure Sensor Schematic

ORDERING INFORMATION

Device

Type

Options

Case

No.

MPX Series

Order No.

Packing

Options

Device Marking

Ported

Element

Vacuum,

Axial Port

482A

MPXV6115VC6U

Rails

MPXV6115V

MPXV6115VC6U

INTEGRATED

PRESSURE SENSOR

-115 TO 0 kPA (-16.7 TO 2.2 psi)

0.2 TO 4.6 VOLTS OUTPUT

MPXV6115VC6U

CASE 482A-01

1. Pins 1, 5, 6, and 8 are internal device

connections. Do not connect to external

circuitry or ground. Pin 1 is denoted by the

notch in the lead.

1

N/C

5

N/C

2

6

N/C

3

GND

7

N/C

4

8

N/C

SMALL OUTLINE PACKAGE

Sensing

Element

GND

Pins 4, 5, and 6 are no connects

Thin Film

Temperature

Compensation

And

Gain Stage #1

Gain Stage #2

And

Ground

Reference

Shift Circuitry