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ADIS16201/PCB 데이터시트(PDF) 13 Page - Analog Devices |
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ADIS16201/PCB 데이터시트(HTML) 13 Page - Analog Devices |
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13 / 32 page ![]() Data Sheet ADIS16201 Rev. C | Page 13 of 32 THEORY OF OPERATION The ADIS16201 is a complete dual-axis digital inclinometer/ accelerometer that uses Analog Devices’ surface-micromachining process and embedded signal processing to make a functionally complete, low cost dual-axis sensor. The ADIS16201 offers a fully calibrated, dual–axis micromachined sensor element that develops independent analog signals representative of the acceleration levels applied to the part. An on-board precision ADC samples the acceleration signals, along with the power supply voltage, an internal temperature signal, and the auxiliary analog input signal. These signals are then processed and latched into addressable output registers. The serial peripheral interface (SPI) provides convenient, digital access to these registers. In addition, the acceleration signals are further processed to produce inclination angle data for both axes. The inclination angle data represents the tilt away from the ideal plane, which in this case, is normal to the earth’s gravitational force. This calculation assumes that no force outside of the earth’s gravitational force is acting on the device. ACCELEROMETER OPERATION The acceleration sensor used in the ADIS16201 is a surface- machined, polysilicon structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Acceleration causes a deflection in the differential capacitor structure that includes both fixed plates and plates that are attached to the moving mass. The fixed plates are driven by a set of square waves that are 180o out-of-phase from one another. Acceleration deflects the beam and unbalances the differential capacitor, resulting in an output square wave whose amplitude is proportional to acceleration. Phase sensitive demodulation techniques rectify the signal and determine the direction of the acceleration. The output of the demodulator is amplified, digitized, and processed to remove any process variations and sensitivities to supply variations. INCLINOMETER OPERATION The ADIS16201 inclinometer output data is linear with respect to degrees of inclination and is dependent on no forces, other than gravity, acting on the device. The ADIS16201 leverages a simple geometrical relationship to convert its calibrated acceleration measurements into an accurate inclination angle estimate. Figure 31 displays the acceleration measurements associated with each incline angle, along with the resulting inclination angle estimate produced by the ADIS16201. One important behavior to observe when using this approach is the fact that the relationship between the acceleration measurements and inclination angle is nonlinear. This non- linear behavior results in larger quantization error changes as the inclination angle approaches 90°. Figure 32 provides a closer look at this behavior by illustrating the increase in step size as the inclination angle estimate increases. Figure 33 offers a direct relationship between the quantization error and the overall inclination angle. 0 90.0 TILT (Degrees) 22.5 45.0 67.5 INCLINATION ACCELERATION Figure 31. Acceleration and Inclination Angle vs. Actual Tilt Angle 75 90 TILT (Degrees) 80 85 INCLINATION ACCELERATION Figure 32. Acceleration and Inclination Angle vs. Actual Tilt Angle |
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