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AT89C51ED2-RDTIM 데이터시트(PDF) 4 Page - ATMEL Corporation

부품명 AT89C51ED2-RDTIM
상세설명  8-bit Flash Microcontroller
PDF  24 Pages
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제조업체  ATMEL [ATMEL Corporation]
홈페이지  http://www.atmel.com
Logo ATMEL - ATMEL Corporation

AT89C51ED2-RDTIM 데이터시트(HTML) 4 Page - ATMEL Corporation

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AT89C51RD2 / AT89C51ED2 QualPack
4
Rev. 0 – 2003 July
3 Technology Information
3.1 Wafer Process Technology
Process Type (Name):
Logic 0.35um with embedded FLASH (AT56800)
Base Material:
Epitaxied Silicon
Wafer Thickness (final)
475 um
Wafer Diameter
150 mm
Number Of Masks
27
Gate Oxide (Logic transistors)
Material
Silicon Dioxide
Thickness
68A
Gate Oxide (EPROM cell)
Material
Silicon Dioxide
Thickness
390A
Polysilicon
Number of Layers
2
Thickness Poly 1
1400A Amorphous
Thickness Poly 2
3200A
Metal
Number of Layers
3
Material:
Aluminum Copper
Layer 1 Thickness
5000A
Layer 2 Thickness
5000A
Layer 3 Thickness
8000A
Passivation
Material
Oxide HDP/ Oxy-nitride
Thickness
21000A



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